Fabrication of advanced probes for atomic force microscopy using focused ion beam
نویسندگان
چکیده
منابع مشابه
Nanodispenser for attoliter volume deposition using atomic force microscopy probes modified by focused-ion-beam milling
In this letter, we describe the on-demand dispensing of single liquid droplets with volumes down to a few attoliters and submicrometric spacing. This dispensing is achieved using a standard atomic force microscope probe, with a 200 nm aperture at the tip apex, opened by focused ion beam milling. The inside of the tip is used as reservoir for the liquid. This maskless dispensing, realized in amb...
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عنوان ژورنال:
- Microelectronics Reliability
دوره 55 شماره
صفحات -
تاریخ انتشار 2015